Polarization-insensitive PECVD SiC waveguides for photonic sensing
نویسندگان
چکیده
Planar silicon carbide (SiC) waveguides are proposed for fabrication on a silicon substrate with a oxide isolation layer. Using post deposition annealing it is possible to achieve low Polarization-Dependent Loss (PDL) within optical SiC waveguides fabricated using a low temperature deposition technique. Those waveguides have been successfully used in power splitters and cantilivers. These first devices open the way for photonic sensing in harsh environment using SiC.
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تاریخ انتشار 2005